coastal instruments

Mass Flow Controller Specialists

Post Office Box 699 - Burgaw, NC 28425 - 910.259.4485

Certificate of Calibration

Certificate #:
NC 00000000

The following device has been calibrated in accord with ANSI Z540 and ISO/IEC-17025 using instruments traceable to the National Institute of Standards and Technology.

Customer Name 1234 Main St. Anywhere, USA					STP Conditions 0.0 Deg. C @ 760 mmHG Calibration Temperature 22.2° C ± 1° C He pre-ship leak rate 0.9 x 10- 10
Model: Serial Number: Range: Gas: Inlet Pressure: Outlet Pressure: Positioning: Calibration Gas: Calibration Date:		MKS 1479A13CR1AM 750460 1000 sccm N2 10 PSIG 0.6 TORR VIU N2, N2 CF = 1 6-2-2005			Initial Inspection No visible contamination Services Disassembled Purged sensor with methyl alcohol and N2 Cleaned parts with Alcohol and DI water Calibrated using Coastal tranfer standards. IAW Document 005, "MFC Calibrations" Assembled with Metal seals Parts Replaced No parts required Comments We appreciate your business! PO #: 999999
Post Cal	Volts	%	Calc. Flow (sccm)	F.S Dev.
	0.012 1.0 2.0 3.0 4.0 5.0	0 20 40 60 80 100	No Flow 202.95 400.848 596.901 794.775 999.5	0.24% 0.29% 0.08% -0.31% -0.52% -0.05%
Pre Cal		0	No Flow	0.00%
	1.0 2.0 3.0 4.0 5.0	20 40 60 80 100	No Pre Cal data taken
Uncertainity of measurement = 0.37% of F.S. (95% confidence level,k = 2) %F.S. Dev. Calculated Target * 100 Full Scale

This report not to be reproduced, except in full, without written authorization by Coastal Instruments, Inc.